[MAIN]
AccFrames=1
Date=2023-05-10
Description=
Device=MIRA3 GMU
FullUserName=student
ImageStripSize=120
Magnification=9.9985e3
Note=
PixelSizeX=27.035e-9
PixelSizeY=27.035e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:37:00
UserName=student
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=8.00
ChamberPressure=108.13e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=244.59e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.9600
GunTiltY=1.5600
HV=5.0000e3
IMLCenteringX=-5.5000
IMLCenteringY=4.0500
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-15.860
OBJCenteringY=-19.070
OBJPreCenteringX=-2.7500
OBJPreCenteringY=-6.8000
PredictedBeamCurrent=130.604353418e-12
PrimaryDetectorGain=43.750
PrimaryDetectorOffset=90.938
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=0.0
SpotSize=6.92410242650e-9
StageRotation=0.0
StageTilt=0.0
StageX=-16.84953e-3
StageY=4.108281e-3
StageZ=20.39617e-3
StigmatorX=8.2200
StigmatorY=-1.2700
SystemPressure=2.1295e-3
TiltCorrection=0.0
WD=15.003e-3