[MAIN]
AccFrames=1
Date=2023-05-15
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=200.00
Note=
PixelSizeX=1.3515e-6
PixelSizeY=1.3515e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=14:50:51
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=-331.75e-3
3DBeamTiltY=-879.79e-9
BeamIntensityIndex=2.00
ChamberPressure=118.39e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=245.30e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-35.680
OBJCenteringY=-52.360
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=13.9966240380e-12
PrimaryDetectorGain=58.008
PrimaryDetectorOffset=93.047
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=0.0
SpotSize=27.1962058557e-9
StageRotation=0.0
StageTilt=0.0
StageX=-4.800469e-3
StageY=-10.97094e-3
StageZ=30.83211e-3
StigmatorX=2.8300
StigmatorY=1.4200
SystemPressure=3.1320e-3
TiltCorrection=0.0
WD=25.000e-3