[MAIN]
AccFrames=1
Date=2023-05-12
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=200.00
Note=
PixelSizeX=1.3516e-6
PixelSizeY=1.3516e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:34:57
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=3.00
ChamberPressure=101.93e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=245.62e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-15.340
OBJCenteringY=-59.040
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=23.9542580171e-12
PrimaryDetectorGain=50.586
PrimaryDetectorOffset=92.656
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=15.3846153846e-12
SpotSize=25.9169387129e-9
StageRotation=0.0
StageTilt=0.0
StageX=-7.682344e-3
StageY=-10.79844e-3
StageZ=55.87891e-3
StigmatorX=7.9300
StigmatorY=-1.0200
SystemPressure=1.1008e-3
TiltCorrection=0.0
WD=50.000e-3