[MAIN]
AccFrames=1
Date=2023-05-15
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=40.000
Note=
PixelSizeX=6.7578e-6
PixelSizeY=6.7578e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=14:11:33
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=3.00
ChamberPressure=150.45e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=245.03e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=300.00
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=2.6800
OBJCenteringY=8.0100
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=23.9542580171e-12
PrimaryDetectorGain=51.758
PrimaryDetectorOffset=92.891
ScanMode=WIDE FIELD
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=11.7216117216e-12
SpotSize=302.110455992e-9
StageRotation=0.0
StageTilt=0.0
StageX=3.795469e-3
StageY=12.63313e-3
StageZ=30.37133e-3
StigmatorX=-2.5200
StigmatorY=640.00e-3
SystemPressure=8.0990e-3
TiltCorrection=0.0
WD=20.000e-3