[MAIN]
AccFrames=1
Date=2023-05-12
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=1.0000e3
Note=
PixelSizeX=270.31e-9
PixelSizeY=270.31e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:09:48
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=8.00
ChamberPressure=115.92e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=47.852
Detector1Offset=92.969
DwellTime=32.000e-6
EmissionCurrent=243.84e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-2.0900
GunTiltY=-2.9500
HV=15.000e3
IMLCenteringX=-39.010
IMLCenteringY=2.6300
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=2.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=7.0700
OBJCenteringY=-43.330
OBJPreCenteringX=9.6000
OBJPreCenteringY=-3.4200
PredictedBeamCurrent=129.746668922e-12
PrimaryDetectorGain=46.680
PrimaryDetectorOffset=92.734
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=55.6776556777e-12
SpotSize=4.99244970190e-9
StageRotation=0.0
StageTilt=0.0
StageX=-7.241250e-3
StageY=11.04344e-3
StageZ=20.16367e-3
StigmatorX=2.0200
StigmatorY=320.00e-3
SystemPressure=2.5083e-3
TiltCorrection=0.0
WD=15.000e-3