[MAIN] AccFrames=1 Date=2023-05-15 Device=MIRA3 GMU FullUserName=Jana Jurmanová ImageStripSize=120 Magnification=200.00 Note= PixelSizeX=1.3516e-6 PixelSizeY=1.3516e-6 ProjectName=CEPLANT Černák (VaVpI) SerialNumber=2131280CZ Sign= TagRevision=2 Time=16:26:21 UserName=janar Version=4.2.30.0 ViewFieldsCountX=2 ViewFieldsCountY=1 [SEM] 3DBeamTiltX=0.0 3DBeamTiltY=0.0 BeamIntensityIndex=8.00 ChamberPressure=108.59e-3 Detector=SE, BSE Detector0=SE Detector1=BSE Detector1Gain=51.758 Detector1Offset=93.125 DwellTime=32.000e-6 EmissionCurrent=245.04e-6 Gun=Schottky GunShiftX=0.0 GunShiftY=0.0 GunTiltX=-2.0900 GunTiltY=-2.9500 HV=15.000e3 IMLCenteringX=-39.010 IMLCenteringY=2.6300 ImageShiftX=0.0 ImageShiftY=0.0 InBeamExtractor=2.0000e3 InBeamScintillator=10.0000e3 LUTGamma=1.0000 LUTMaximum=255 LUTMinimum=0 MixingMode=2 OBJCenteringX=7.0700 OBJCenteringY=-43.330 OBJPreCenteringX=9.6000 OBJPreCenteringY=-3.4200 PredictedBeamCurrent=129.746668922e-12 PrimaryDetectorGain=50.586 PrimaryDetectorOffset=92.578 ScanMode=RESOLUTION ScanRotation=0.0 ScanSpeed=6 SpecimenCurrent=109.157509158e-12 SpotSize=4.99244970190e-9 StageRotation=0.0 StageTilt=0.0 StageX=-6.617031e-3 StageY=11.44281e-3 StageZ=21.44031e-3 StigmatorX=2.0200 StigmatorY=320.00e-3 SystemPressure=2.3662e-3 TiltCorrection=0.0 WD=15.000e-3