[MAIN]
AccFrames=1
Date=2023-05-15
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=5.0000e3
Note=
PixelSizeX=54.063e-9
PixelSizeY=54.063e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=16:33:30
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=8.00
ChamberPressure=102.01e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=51.758
Detector1Offset=93.125
DwellTime=32.000e-6
EmissionCurrent=245.05e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-2.0900
GunTiltY=-2.9500
HV=15.000e3
IMLCenteringX=-39.010
IMLCenteringY=2.6300
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=2.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=7.0700
OBJCenteringY=-43.330
OBJPreCenteringX=9.6000
OBJPreCenteringY=-3.4200
PredictedBeamCurrent=129.746668922e-12
PrimaryDetectorGain=50.586
PrimaryDetectorOffset=92.578
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=88.6446886447e-12
SpotSize=4.99244970190e-9
StageRotation=0.0
StageTilt=0.0
StageX=-6.419844e-3
StageY=11.17188e-3
StageZ=20.81453e-3
StigmatorX=2.0200
StigmatorY=320.00e-3
SystemPressure=1.5134e-3
TiltCorrection=0.0
WD=15.000e-3