Technologie depozice tenkých vrstev a povrchových úprav
3. Evaporation / Napařování
Presentation slides (course notes) for this chapter (in English):
3.1 Introduction to Evaporation
3.2 Thermodynamics of Vaporization
Further explanation of Gibbs free energy meaning:3.3 Evaporation Rate
3.4 Alloys & Compounds
3.5 Sources for Thermal Evaporation
3.6 Sources with Energetic Beams
3.7 Transport
One of the most used methods for the monitoring of the deposition process during evaporation is quartz crystal microbalance (QCM) measurements of mass deposition rate:
Recommended text for reading (in English):
Chyba: Odkazovaný objekt neexistuje nebo nemáte právo jej číst.
https://is.muni.cz/el/sci/jaro2023/F4280/um/67960598/Smith-cha4_evaporation.pdf
Chyba: Odkazovaný objekt neexistuje nebo nemáte právo jej číst.
https://is.muni.cz/el/sci/jaro2023/F4280/um/67960598/Smith-cha8_energ-beam.pdf
On-line questionnaire (ROPOT) that is mandatory to pass successfully (in English):
otazky-ke-zjisteni-znalostiF4280_kap3-naparovani.pdf