[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=5.0000e3
Note=
PixelSizeX=54.063e-9
PixelSizeY=54.063e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=12:22:07
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=6.00
ChamberPressure=101.22e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=59.961
Detector1Offset=93.516
DwellTime=32.000e-6
EmissionCurrent=242.05e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-15.340
OBJCenteringY=-59.040
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=62.2363672340e-12
PrimaryDetectorGain=48.242
PrimaryDetectorOffset=91.875
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=6.59340659341e-12
SpotSize=7.85357534115e-9
StageRotation=0.0
StageTilt=0.0
StageX=-14.24781e-3
StageY=3.287344e-3
StageZ=22.21039e-3
StigmatorX=8.9700
StigmatorY=-580.00e-3
SystemPressure=1.0816e-3
TiltCorrection=0.0
WD=15.000e-3