[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=100.000
Note=
PixelSizeX=2.7031e-6
PixelSizeY=2.7031e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=12:02:13
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=-201.91e-3
3DBeamTiltY=-186.38e-9
BeamIntensityIndex=8.00
ChamberPressure=117.81e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=241.24e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-35.680
OBJCenteringY=-52.360
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=130.472881300e-12
PrimaryDetectorGain=42.773
PrimaryDetectorOffset=92.500
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=90.1098901099e-12
SpotSize=26.1721948711e-9
StageRotation=0.0
StageTilt=999.9375e-3
StageX=9.275000e-3
StageY=9.568281e-3
StageZ=51.77227e-3
StigmatorX=2.4900
StigmatorY=1.2900
SystemPressure=3.1452e-3
TiltCorrection=0.0
WD=45.000e-3