[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=500.00
Note=
PixelSizeX=540.62e-9
PixelSizeY=540.62e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=11:55:33
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=8.00
ChamberPressure=132.57e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=241.73e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-15.340
OBJCenteringY=-59.040
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=130.472881300e-12
PrimaryDetectorGain=43.945
PrimaryDetectorOffset=92.500
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=37.3626373626e-12
SpotSize=15.6792522350e-9
StageRotation=0.0
StageTilt=999.9375e-3
StageX=6.448281e-3
StageY=8.292500e-3
StageZ=51.77227e-3
StigmatorX=8.9700
StigmatorY=-580.00e-3
SystemPressure=5.8950e-3
TiltCorrection=0.0
WD=45.000e-3