[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=50.000
Note=
PixelSizeX=5.4062e-6
PixelSizeY=5.4062e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=13:58:17
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=6.00
ChamberPressure=97.382e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=49.609
Detector1Offset=93.438
DwellTime=32.000e-6
EmissionCurrent=242.28e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-2.0900
GunTiltY=-2.9500
HV=15.000e3
IMLCenteringX=-39.010
IMLCenteringY=2.6300
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=300.00
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=70.000e-3
OBJCenteringY=7.3500
OBJPreCenteringX=9.6000
OBJPreCenteringY=-3.4200
PredictedBeamCurrent=62.0184901565e-12
PrimaryDetectorGain=45.898
PrimaryDetectorOffset=93.047
ScanMode=WIDE FIELD
ScanRotation=347.50
ScanSpeed=6
SpecimenCurrent=35.1648351648e-12
SpotSize=135.646036494e-9
StageRotation=0.0
StageTilt=0.0
StageX=4.446562e-3
StageY=1.739219e-3
StageZ=22.51492e-3
StigmatorX=-13.860
StigmatorY=260.00e-3
SystemPressure=793.95e-6
TiltCorrection=0.0
WD=15.000e-3