[MAIN]
AccFrames=1
Date=2023-05-15
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=75.000
Note=
PixelSizeX=3.6041e-6
PixelSizeY=3.6041e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=14:39:47
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=2.00
ChamberPressure=119.56e-3
Detector=SE
DwellTime=10.0000e-6
EmissionCurrent=244.75e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=300.00
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=2.6800
OBJCenteringY=8.0100
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=13.9966240380e-12
PrimaryDetectorGain=56.836
PrimaryDetectorOffset=92.891
ScanMode=WIDE FIELD
ScanRotation=0.0
ScanSpeed=5
SpecimenCurrent=8.05860805861e-12
SpotSize=437.222808731e-9
StageRotation=0.0
StageTilt=0.0
StageX=-6.203750e-3
StageY=-6.627344e-3
StageZ=30.54727e-3
StigmatorX=-2.5200
StigmatorY=640.00e-3
SystemPressure=3.8318e-3
TiltCorrection=0.0
WD=25.000e-3