[MAIN]
AccFrames=1
Date=2023-05-12
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=1.0026e3
Note=
PixelSizeX=269.62e-9
PixelSizeY=269.62e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:01:42
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=6.00
ChamberPressure=118.39e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=55.664
Detector1Offset=93.203
DwellTime=32.000e-6
EmissionCurrent=244.17e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-2.0900
GunTiltY=-2.9500
HV=15.000e3
IMLCenteringX=-39.010
IMLCenteringY=2.6300
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=2.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=7.0700
OBJCenteringY=-43.330
OBJPreCenteringX=9.6000
OBJPreCenteringY=-3.4200
PredictedBeamCurrent=62.0184901565e-12
PrimaryDetectorGain=54.492
PrimaryDetectorOffset=92.891
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=47.6190476190e-12
SpotSize=5.73680856954e-9
StageRotation=0.0
StageTilt=0.0
StageX=6.397969e-3
StageY=12.07953e-3
StageZ=20.57391e-3
StigmatorX=2.0200
StigmatorY=320.00e-3
SystemPressure=3.2303e-3
TiltCorrection=0.0
WD=15.000e-3