[MAIN]
AccFrames=1
Date=2023-05-10
Description=
Device=MIRA3 GMU
FullUserName=student
ImageStripSize=120
Magnification=94.779
Note=
PixelSizeX=2.8520e-6
PixelSizeY=2.8520e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:30:25
UserName=student
Version=4.2.30.0

[SEM]
3DBeamTiltX=-300.70e-3
3DBeamTiltY=-655.09e-9
BeamIntensityIndex=8.00
ChamberPressure=110.98e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=244.59e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.9600
GunTiltY=1.5600
HV=5.0000e3
IMLCenteringX=-5.5000
IMLCenteringY=4.0500
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-22.970
OBJCenteringY=-40.210
OBJPreCenteringX=-2.7500
OBJPreCenteringY=-6.8000
PredictedBeamCurrent=130.604353418e-12
PrimaryDetectorGain=43.945
PrimaryDetectorOffset=92.578
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=70.3296703297e-12
SpotSize=15.9140159475e-9
StageRotation=0.0
StageTilt=0.0
StageX=-7.323125e-3
StageY=10.54078e-3
StageZ=31.41453e-3
StigmatorX=1.7700
StigmatorY=2.0200
SystemPressure=2.3745e-3
TiltCorrection=0.0
WD=25.000e-3