[MAIN]
AccFrames=1
Date=2023-05-12
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=16.491
Note=
PixelSizeX=16.391e-6
PixelSizeY=16.391e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:33:11
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=3.00
ChamberPressure=101.93e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=245.37e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=300.00
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=2.6800
OBJCenteringY=8.0100
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=23.9542580171e-12
PrimaryDetectorGain=51.367
PrimaryDetectorOffset=92.891
ScanMode=WIDE FIELD
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=7.32600732601e-12
SpotSize=802.465514201e-9
StageRotation=0.0
StageTilt=0.0
StageX=-8.428281e-3
StageY=-11.64406e-3
StageZ=57.40984e-3
StigmatorX=-2.5200
StigmatorY=640.00e-3
SystemPressure=1.1595e-3
TiltCorrection=0.0
WD=51.531e-3