[MAIN]
AccFrames=1
Date=2023-05-12
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=1.0100e3
Note=
PixelSizeX=267.64e-9
PixelSizeY=267.64e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=15:36:31
UserName=janar
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=1.00
ChamberPressure=101.01e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=245.60e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-15.340
OBJCenteringY=-59.040
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=10.0133258868e-12
PrimaryDetectorGain=56.844
PrimaryDetectorOffset=93.047
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=5.12820512821e-12
SpotSize=31.1338096199e-9
StageRotation=0.0
StageTilt=0.0
StageX=-7.644531e-3
StageY=-10.74844e-3
StageZ=56.90391e-3
StigmatorX=7.9300
StigmatorY=-1.0200
SystemPressure=1.0370e-3
TiltCorrection=0.0
WD=50.000e-3