[MAIN]
AccFrames=1
Date=2023-05-10
Description=
Device=MIRA3 GMU
FullUserName=student
ImageStripSize=120
Magnification=2.0389e3
Note=
PixelSizeX=132.58e-9
PixelSizeY=132.58e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=16:22:10
UserName=student
Version=4.2.30.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=500e-3
ChamberPressure=120.24e-3
Detector=SE
DwellTime=32.000e-6
EmissionCurrent=244.54e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.9600
GunTiltY=1.5600
HV=5.0000e3
IMLCenteringX=-5.5000
IMLCenteringY=4.0500
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=0
OBJCenteringX=-15.860
OBJCenteringY=-19.070
OBJPreCenteringX=-2.7500
OBJPreCenteringY=-6.8000
PredictedBeamCurrent=4.99624857455e-12
PrimaryDetectorGain=60.352
PrimaryDetectorOffset=93.125
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=2.19780219780e-12
SpotSize=13.2618833428e-9
StageRotation=0.0
StageTilt=0.0
StageX=7.251406e-3
StageY=12.08344e-3
StageZ=20.32289e-3
StigmatorX=8.2200
StigmatorY=-1.2700
SystemPressure=4.7745e-3
TiltCorrection=0.0
WD=15.000e-3