Technologie depozice tenkých vrstev a povrchových úprav

3. Evaporation / Napařování


Presentation slides (course notes) for this chapter (in English):

3.1 Introduction to Evaporation

3.2 Thermodynamics of Vaporization

Further explanation of Gibbs free energy meaning:

3.3 Evaporation Rate

3.4 Alloys & Compounds

3.5 Sources for Thermal Evaporation

3.6 Sources with Energetic Beams


3.7 Transport


One of the most used methods for the monitoring of the deposition process during evaporation is quartz crystal microbalance (QCM) measurements of mass deposition rate:


Recommended text for reading (in English):

Chyba: Odkazovaný objekt neexistuje nebo nemáte právo jej číst.
https://is.muni.cz/el/sci/jaro2024/F4280/um/67960598/Smith-cha4_evaporation.pdf
Chyba: Odkazovaný objekt neexistuje nebo nemáte právo jej číst.
https://is.muni.cz/el/sci/jaro2024/F4280/um/67960598/Smith-cha8_energ-beam.pdf

On-line questionnaire (ROPOT) that is mandatory to pass successfully (in English):


Self-checking the knowledge you have learned in this chapter - the set of questions to whose you should be able to find the answer (in Czech):
otazky-ke-zjisteni-znalostiF4280_kap3-naparovani.pdf
PDF ke stažení