[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=200.00
Note=
PixelSizeX=1.3516e-6
PixelSizeY=1.3516e-6
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=12:43:13
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=6.00
ChamberPressure=98.414e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=59.570
Detector1Offset=93.516
DwellTime=32.000e-6
EmissionCurrent=241.98e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-35.680
OBJCenteringY=-52.360
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=62.2363672340e-12
PrimaryDetectorGain=50.195
PrimaryDetectorOffset=92.266
ScanMode=DEPTH
ScanRotation=0.0
ScanSpeed=6
SpecimenCurrent=14.6520146520e-12
SpotSize=13.3119548154e-9
StageRotation=0.0
StageTilt=0.0
StageX=-3.341875e-3
StageY=-8.329219e-3
StageZ=20.46000e-3
StigmatorX=2.4900
StigmatorY=1.2900
SystemPressure=630.95e-6
TiltCorrection=0.0
WD=15.000e-3