[MAIN]
AccFrames=1
Date=2023-05-17
Device=MIRA3 GMU
FullUserName=Jana Jurmanová
ImageStripSize=120
Magnification=2.0000e3
Note=
PixelSizeX=135.16e-9
PixelSizeY=135.16e-9
ProjectName=CEPLANT Černák (VaVpI)
SerialNumber=2131280CZ
Sign=
TagRevision=2
Time=13:02:23
UserName=janar
Version=4.2.30.0
ViewFieldsCountX=2
ViewFieldsCountY=1

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=8.00
ChamberPressure=96.972e-3
Detector=SE, BSE
Detector0=SE
Detector1=BSE
Detector1Gain=56.641
Detector1Offset=91.250
DwellTime=32.000e-6
EmissionCurrent=242.00e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-3.6900
GunTiltY=1.2600
HV=5.0000e3
IMLCenteringX=-23.910
IMLCenteringY=-1.5900
ImageShiftX=0.0
ImageShiftY=0.0
InBeamExtractor=3.0000e3
InBeamScintillator=10.0000e3
LUTGamma=1.0000
LUTMaximum=255
LUTMinimum=0
MixingMode=2
OBJCenteringX=-15.340
OBJCenteringY=-59.040
OBJPreCenteringX=1.5900
OBJPreCenteringY=-180.00e-3
PredictedBeamCurrent=130.472881300e-12
PrimaryDetectorGain=47.070
PrimaryDetectorOffset=91.406
ScanMode=RESOLUTION
ScanRotation=350.00
ScanSpeed=6
SpecimenCurrent=19.0476190476e-12
SpotSize=6.92981901451e-9
StageRotation=0.0
StageTilt=0.0
StageX=1.739375e-3
StageY=-11.77063e-3
StageZ=20.25203e-3
StigmatorX=8.1870
StigmatorY=-2.2210
SystemPressure=476.35e-6
TiltCorrection=0.0
WD=15.000e-3