Rapid Solid-State Metathesis Routes to Aluminum Nitride Rebecca A. Janes, Madeleine A. Low, and Richard B. Kaner* Department of Chemistry and Biochemistry, and Exotic Materials Institute, UniVersity of California, Los Angeles, California 90095-1569 Received October 29, 2002 Metathesis (exchange) reactions offer the possibility of controlling temperature through a judicious choice of precursors. Here, a reaction between AlCl3 and Ca3N2 is found to produce phase-pure aluminum nitride (AlN) in seconds. The CaCl2 byproduct salt, whose formation drives this highly exothermic reaction, is simply washed away after reaction completion. SEM images demonstrate that the AlN product is a micron-sized powder, while TEM shows well- formed crystallites. Thermodynamic calculations indicate that a reaction temperature of 2208 K could be reached under adiabatic conditions. Using an in situ thermocouple and a stainless steel reactor vessel to hold the precursors, a reaction temperature of 1673 K is measured 0.8 s after initiation. Switching to a thermally insulating ceramic vessel produces a maximum reaction temperature of 2010 K because of the more nearly adiabatic conditions. The high reaction temperature appears to be critical to forming phase-pure AlN. Experiments with Li3N, instead of Ca3N2, produce lower temperatures (1513 K), resulting in both Al and Al2O3 impurities. Introduction Miniaturization of high-power electronic devices greatly increases the amount of thermal energy produced per unit area during their operation. This creates a need for materials that can dissipate heat rapidly to avoid electronic or me- chanical failure.1 Aluminum nitride (AlN) is an important thermal management material for silicon-based electronics because of its low coefficient of thermal expansion (4.3 × 10-6 K-1 ), closely matching that of silicon, and its very high thermal conductivity (320 W m-1 K-1 ).2 AlN is an insulator with a large band gap (Eg ) 6.4 eV), high resistivity (>1011 m), and low dielectric constant (8.6).3 These physical properties make AlN promising for use as an electronic substrate and as a packaging material for circuits.4 Other applications for AlN include UV photodetectors, pressure sensors, thermal radiation sensors, and field-effect tran- sistors.5,6 There is a need for new synthetic approaches to AlN and other nitrides, because most current methods are time- consuming and/or expensive. Syntheses of AlN often involve processes with complex equipment, such as ion beam evaporation4 or DC arc plasma, which forces aluminum ingots to react with ammonia or nitrogen gas under extreme conditions.7 Another synthetic method, carbothermal reduc- tion, involves the conversion of Al2O3 and C in a N2 or NH3 atmosphere into AlN at high temperatures (>1600 K) for several hours.8 Self-propagating high-temperature synthesis represents an additional route to AlN, in which Al metal powder is reacted with elemental nitrogen or NaN3 at high pressures (>1000 atm) and temperatures (up to 1900 K).9 One drawback to this synthesis is incomplete nitridation, especially at lower pressures. A major challenge is to obtain a high yield of pure AlN at moderate temperatures and low pressures. Solid-state metathesis (exchange) reactions offer the advantages of a rapid, high-yield method that starts from room-temperature solids and needs little equipment. The idea behind metathesis reactions is to use the exothermicity of * To whom correspondence should be addressed. E-mail: kaner@ chem.ucla.edu. Phone: 310-825-1346. Fax: 310-206-4038. (1) Jagannadham, K.; Watkins, T. R.; Dinwiddie, R. B. J. Mater. Sci. 2002, 37, 1363-1376. (2) Kitagawa, H.; Shibutani, Y.; Ogata, S. Model. Simul. Mater. Sci. Eng. 1995, 3, 521-531. (3) Goldberg, Y. In Properties of AdVanced Semiconducting Materials: GaN, AlN, InN, BN, SiC, SiGe; Levinshtein, M. E., Rumyantsev, S. L., Shur, M. S., Eds.; John Wiley & Sons: New York, 2001; pp 31- 47. (4) Zhu, Q.; Jiang, W. H.; Yatsui, K. J. Appl. Phys. 1999, 86, 5279- 5285. (5) Fuflyigin, V.; Salley, E.; Osinsky, A.; Norris, P. Appl. Phys. Lett. 2000, 77, 3075-3077. (6) Djurisic, A. B.; Bundaleski, N. K.; Li, E. H. Semicond. Sci. Technol. 2001, 16, 91-97. (7) Li, H. D.; Zou, G. T.; Wang, H.; Yang, H. B.; Li, D. M.; Li, M. H.; Yu, S.; Wu, Y.; Meng, Z. F. J. Phys. Chem. B 1998, 102, 8692- 8695. (8) Contursi, L.; Bezzi, G.; Beghelli, G. (TEMAV S.p.A.). Process for preparing fine aluminum nitride powder from an inorganic flocculant. Venice Porto Marghera EP0481563, Apr 22, 1992. (9) Munir, Z. A.; Holt, J. B. J. Mater. Sci. 1987, 22, 710-714. Inorg. Chem. 2003, 42, 2714-2719 2714 Inorganic Chemistry, Vol. 42, No. 8, 2003 10.1021/ic026143z CCC: $25.00 2003 American Chemical Society Published on Web 03/25/2003 salt formation to rapidly create a desired product. A metal halide is combined with an alkali or alkaline earth main- group compound to produce the desired product plus a salt that is then washed away with water or alcohol. Metathesis reactions have proven to be successful in the synthesis of a number of crystalline refractory materials including borides,10 chalcogenides,11,12 and nitrides.13-15 Once initiated, metathesis reactions reach high tempera- tures (>1200 K) in a fraction of a second and cool very quickly (often <5 s). Because of the rapid nature of these reactions, nucleation and growth are quickly terminated, generally resulting in small crystallites and occasionally forming metastable phases.11,16 Previous attempts to make AlN via metathesis reactions resulted in oxide impurities.17 Here, phase-pure AlN is synthesized in seconds from a metathesis reaction between Ca3N2 and AlCl3. The use of Ca3N2, which increases the temperature of the reaction, is critical to avoiding impurities. Products are characterized using powder X-ray diffraction, scanning electron micros- copy, transmission electron microscopy, and in situ temper- ature analysis. Experimental Section The precursors AlCl3 (Strem, 99.99%), Al2S3 (Cerac, 99.9%), Li3N (Cerac, 99.5%), and Ca3N2 (Cerac, 99%) were used as received. AlI3 was formed by heating its constituent elements (Al, Cerac, 99.5%; I2, Fisher) through a vapor-transport reaction in an evacuated, sealed Pyrex tube using a temperature gradient from 463 to 623 K, as modified slightly from a literature preparation of GaI3.18 The synthesis of aluminum nitride was carried out in a helium- filled glovebox (Vacuum Atmospheres MO-40). The amounts of reactants were adjusted to produce 0.20 g (4.8 mmol) of AlN product. Stoichiometric amounts of the reactants were weighed and ground together with an agate mortar and pestle. The reactants were then transferred to a stainless steel (or ceramic) cup and placed within a larger capped steel reaction vessel, modeled after a bomb calorimeter.19 This allows for containment of any gases produced. The reaction is initiated through the use of a resistively heated Nichrome wire and is complete in less than a second. Warning: Solid-state metathesis reactions are highly exothermic and can initiate as the reagents are being ground together. Precautions should be taken before performing this type of reaction, and extreme care should be used when scaling up reactions. The reaction products are then removed from the drybox and washed in 0.5 M HCl or 1.0 M H3PO4. While the aqueous washing solution removes the byproduct salt, the acid prevents base-catalyzed hydrolysis of the product.20,21 To reduce the amount of time the AlN is in the aqueous solvent, the product is immediately vacuum filtered and then dried in a furnace at 450 K. Because cellulose filter paper cannot withstand the acid washing, glass microfiber filter paper (Millipore) is used instead. In situ reaction temperature measurements were made by modifying the stainless steel reactor. A hole was drilled through the bottom of both the steel canister and the reaction cup. A thermocouple was threaded through the hole and placed directly into the reaction mixture and secured with ceramic paste. A computer was connected to the thermocouple and programmed to record one data point every millisecond. Product Characterization Powder X-ray diffraction was performed on the washed products using a Crystal Logic -2 diffractometer with a graphite mono- chromator and Cu KR ) 1.5418 radiation. The scans were taken between 10 and 100° 2 at 0.1° intervals with a 3-s count time. Least-squares refinement was carried out using MacDiff (http:// www.geol.uni-erlangen.de/html/software/Macdiff.html) to fit the X-ray diffraction peaks and Unit Cell (http://www.esc.cam.ac.uk/ astaff/holland/UnitCell.html) to then calculate the lattice parameters. In situ reaction temperatures were measured in a modified reactor with 0.03-in.-diameter C-type (Omega, 26% rhenium/84% tungsten versus 5% rhenium/85% tungsten) high-temperature thermocouples, which were placed directly into the reaction mixture. Scanning electron microscopy (SEM-Stereoscan 250) was used to characterize surface structure and particle size of the product. Transmission electron microscopy (TEM JEOL 100CX) provides a fuller picture of the morphology of the AlN crystallites. Thermogravimetric analysis (TGA) was carried out on a Perkin-Elmer Pyris Diamond TG/DTA, from room temperature to 1770 K, at increments of 10 °C/min. Results and Discussion Solid-state metathesis reactions between the aluminum precursors (AlCl3 or Al2S3) and the nitriding agents (Li3N or Ca3N2) proceed in a rapid, exothermic manner upon initiation with a resistively heated Nichrome wire, as follows The real driving force behind each reaction is the formation of an ionic salt (LiCl, Li2S, or CaCl2), which is so favorable that the reactions become self-propagating. The salt that is produced can then be washed away. When choosing reagents for metathesis reactions, several important factors must be considered, including the stability of products versus reactants, the temperatures at which the precursors change phase, and the maximum reaction tem- perature. Clearly, the products must be considerably more stable than the reactants to create an exothermic reaction that will self-propagate. A phase change of one of the precursors is generally needed to initiate a solid-state metathesis (10) Rao, L.; Gillan, E. G.; Kaner, R. B. J. Mater. Res. 1995, 10, 353- 361. (11) Gillan, E. G.; Kaner, R. B. J. Mater. Chem. 2001, 11, 1951-1956. (12) Hector, A.; Parkin, I. P. Polyhedron 1993, 12, 1855-1862. (13) Rao, L.; Kaner, R. B. Inorg. Chem. 1994, 33, 3210-3211. (14) Wallace, C. H.; Reynolds, T. K.; Kaner, R. B. Chem. Mater. 1999, 11, 2299-2301. (15) Fitzmaurice, J. C.; Hector, A.; Parkin, I. P. Polyhedron 1993, 12, 1295-1300. (16) Jarvis, R. F.; Jacubinas, R. M.; Kaner, R. B. Inorg. Chem. 2000, 39, 3243-3246. (17) Ponthieu, E.; Rao, L.; Gengembre, L.; Grimblot, J.; Kaner, R. B. Solid State Ionics 1993, 63-5, 116-121. (18) Corbett, J. D.; McMullan, R. K. J. Am. Chem. Soc. 1955, 77, 4217- 4219. (19) Bonneau, P. R.; Wiley, J. B.; Kaner, R. B. Inorganic Synthesis 1995, 30, 33-37. (20) Bowen, P.; Highfield, J. G.; Mocellin, A.; Ring, T. A. J. Am. Ceram. Soc. 1990, 73, 724-728. (21) Krnel, K.; Kosmac, T. J. Eur. Ceram. Soc. 2001, 21, 2075-2079. AlCl3 + Li3N f AlN + 3LiCl (1) 0.5Al2S3 + Li3N f AlN + 1.5Li2S (2) AlCl3 + 0.5Ca3N2 f AlN + 1.5CaCl2 (3) Metathesis Routes to Aluminum Nitride Inorganic Chemistry, Vol. 42, No. 8, 2003 2715 reaction.22 Once initiated, the heat generated by salt formation needs to be sufficient to keep the salt produced in a molten state. If this is the case, the reaction will be self-propagating.10 Theoretical reaction temperatures can be calculated using the enthalpy of reaction (Hrxn), temperature-dependent heat capacities (Cp), and enthalpies of phase changes. The adiabatic maximum reaction temperatures, referred to as Tmax, assume that reactions proceed to completion with no heat loss. The synthesis of AlN was approached by considering several possible precursors, including aluminum halides or chalcogenides in combination with alkali or alkaline earth nitrides. Figure 1 shows a progression of products from a low-quality nitride contaminated with both aluminum metal and aluminum oxides to a phase-pure, high-quality nitride. The metal chloride (AlCl3) was chosen first because of its relatively low cost and low sublimation temperature (453 K). AlCl3 was ground together with Li3N, the mixture was placed in a stainless steel reactor, and the reaction was initiated with a Nichrome wire (eq 1). This reaction produces moderately crystalline AlN (Figure 1, top); however, there is contamination from Al metal and alumina. The aluminum impurity most likely results from reduction of the AlCl3 precursor during reaction. Alumina, on the other hand, likely forms as a result of the aqueous wash, either from unreacted precursors or from hydrolysis of small, poorly formed AlN particles that are more susceptible to oxidation. Note that alumina is not observed in powder X-ray diffraction patterns taken before washing, but Al metal is. Changing the precursor from AlCl3 to AlI3 results in products and impurities similar to those found with AlCl3. Because the melting point of AlI3 is 461 Ksversus 453 K for the sublimation temperature of AlCl3sthe reaction initiates at nearly the same temperature. A comparable Tmax is observed, along with aluminum and alumina impurities. To achieve greater nitridation of the product, Al2S3 was substituted for AlCl3. The idea is that, because Al2S3 has an anion with a doubly negative charge, a more stable byproduct salt, Li2S, is expected. The Hf for Li2S is -446.9 kJ/mol, compared to a Hf of -408.4 kJ/mol for LiCl.23 Aluminum sulfide was mixed and ground together with Li3N in an agate mortar and pestle, the mixture was placed in the stainless steel reactor, and the reaction was initiated with a heated filament. The products were then removed from the He atmosphere drybox, filtered, and dried in an oven at 450 K (Figure 1, middle). The AlN produced from the reaction of Al2S3 and Li3N is slightly more crystalline than that formed from AlCl3 and Li3N (Figure 1, top), and the Al2O3 impurity is eliminated. However, unwanted Al metal still presents a problem. The persistence of metallic Al in the product at first suggested that more nitriding agent might be needed. Thus, several nitrogen-containing salts including NH4Cl, NaN3, and LiNH2 were added into the reactions. As the reactions release heat after initiation, these salts decompose, and can supply either nitrogen or ammonia to aid in nitride formation.14,24 However, instead of increasing the crystallinity of the nitride product, all of these additives resulted in less-crystalline products with more impurities. Adding an excess of nitride starting material also yielded only negative results. The commonality among these attempts to improve the reactions is that excess reagents act as heat sinks and lower reaction temperatures. Because this leads to less-crystalline products, a method was sought that would instead raise the reaction temperature. Aside from the possibility that AlN might simply form more readily at elevated temperatures, higher temperatures have other advantages, including more energy available to surmount activation barriers and an increased probability of reactants finding each other in the short time of reaction. Additionally, once the product forms, crystal growth will continue as long as the byproduct salt remains molten due to Ostwald ripening.25,26 Because hotter reactions take longer to cool, more time will be available for crystal growth, generally leading to higher crystallinity along with greater yields. (22) Treece, R. E.; Gillan, E. G.; Kaner, R. B. Comments Inorg. Chem. 1995, 16, 313-337. (23) Chase, M. W., Jr.; Daview, C. A.; Downey, J. R., Jr.; Frurip, D. J.; McDonald, R. A.; Syverud, A. N. JANAF Thermochemical Tables; National Bureau of Standards: Washington, DC, 1985; Vol. 14. (24) O'Loughlin, J. L.; Wallace, C. H.; Knox, M. S.; Kaner, R. B. Inorg. Chem. 2001, 40, 2240-2245. (25) Ostwald, W. Z. Phys. Chem. 1901, 37, 385. (26) Baldan, A. J. Mater. Sci. 2002, 37, 2171-2202. Figure 1. Powder X-ray diffraction patterns of the washed products from the following solid-state metathesis reactions that produce AlN: AlCl3 + Li3N (top), 0.5 Al2S3 + Li3N (middle), and AlCl3 + 0.5 Ca3N2 (bottom). The Miller indices (hkl) for hexagonal AlN are given in the highly crystalline pattern produced by reacting AlCl3 with Ca3N2 (bottom). Aluminum (#) and alumina (*) impurities are found in the other reactions. Janes et al. 2716 Inorganic Chemistry, Vol. 42, No. 8, 2003 Using Al2S3 but changing the nitriding agent to Ca3N2 was expected to achieve a higher reaction temperature with the possibility of producing AlN with enhanced crystallinity because the calcium sulfide byproduct salt is very stable (Hf ) -473.2 kJ/mol). Unfortunately, the reaction of Ca3N2 and Al2S3 did not propagate. This is likely related to the very high melting point of the byproduct salt CaS (mp ) 2524 K). Previous experiments have shown that, if the energy generated by salt formation only is insufficient to keep the salt produced in a molten state, propagation will cease. This value, called Tmax,salt, was calculated for each reaction and presented in Table 1. For the reaction between Al2S3 and Ca3N2, Tmax,salt is 1202 K, well below the melting point of CaS, and therefore, it is not surprising that this reaction does not self-propagate. The aluminum precursor was therefore changed back to AlCl3 while maintaining Ca3N2 as the nitriding agent. The maximum adiabatic temperature predicted for the reaction of Ca3N2 and AlCl3 is 2208 Ksover 550 K above the value calculated for the reaction between Li3N and AlCl3. This predicted increase in reaction temperature is mainly due to the higher thermodynamic stability of the byproduct salt CaCl2 (Hf ) -795 kJ/mol) versus LiCl (Hf ) -408.4 kJ/mol).23 Because the value for Tmax,salt (1427 K) is now above the melting point of the CaCl2 salt byproduct (1045 K), this reaction is expected to propagate. As hoped, this reaction not only propagates rapidly but succeeds in produc- ing single-phase, crystalline hexagonal AlN (Figure 1, bottom). A least-squares refinement of the X-ray data gives lattice parameters of a ) 3.1090 and c ) 4.9749 ((0.0012 ), which closely matches the literature values of a ) 3.1114 and c ) 4.9792 (JCPDS no. 25-1133). The Al content of the AlN is 48 mol % (50% expected) based on thermogravimetric analysis carried out in air to 1773 K, which converts all of the AlN to Al2O3 (corundum). The slightly lower than expected Al content might be due to some surface phosphate left from the acid wash. The yield of the product is typically about 80%, based on a reaction scale of 0.2 g. A larger reaction scale is likely to increase the yield significantly.27 At the 0.2-g reaction scale, mechanical losses of product due to transfers and material trapped in the filter paper is significant. The relative amount of these losses would be less important at larger scales. However, caution is advised in scaling up these highly exothermic reactions. To measure the actual temperatures achieved in the AlN- forming reactions, type C thermocouples were inserted directly into the stainless steel reaction vessels. Temperature profiles for each reaction are presented in Figure 2. As expected, the least energetic reaction, Al2S3 + Li3N (Figure 2d), produced the lowest Tmax (1373 K). The reaction of AlCl3 with Li3N increased the measured Tmax to 1513 K (Figure 2c). Switching from Li3N to Ca3N2 resulted in a further increase in Tmax to 1673 K, which was reached 0.8 s after initiation of the reaction (Figure 2b). Although the reaction with calcium nitride reached higher temperatures than the reactions with Li3N, as expected from the Tmax calculations (see Table 1), it is apparent that the measured temperatures are considerably lower than the calculated theoretical maximum temperatures. This is most likely due to nonadiabatic conditions. The high thermal conductivity of the stainless steel reaction vessel suggested that this might be largely responsible. Thus, in the hope of improving the experimental Tmax value, the reaction of AlCl3 + Ca3N2 was repeated in a thermally insulating ceramic cup. The result was an increase of over 300 K in Tmax to 2010 K. This result is much closer to the calculated adiabatic value of 2208 K. Additionally, an increase in the crystallinity of the product was observed (Figure 1, bottom). Because slower heat dissipation results in the product remaining in the molten salt matrix for longer times, more Ostwald ripening, and hence enhanced crystallinity, occurs. This, in turn, makes the AlN product more resistant to hydrolysis in water. From the in situ temperature measurements, it appears that Tmax g 1673 K is needed to produce phase-pure AlN via metathesis reactions. Either products formed in cooler reactions never attain enough heat to produce AlN or the low crystallinity of the AlN particles formed make them vulnerable to attack during the aqueous wash. These results explain why Ca3N2 is preferable to Li3N as a nitriding agent for reactions with aluminum halides. Thermal dissipation explains why the Tmax results are lower than predicted for AlCl3 + Ca3N2 and AlCl3 + Li3N, but does not entirely describe the case of Al2S3, where in situ measurements are found to be only about one-half of the calculated adiabatic values. Because the Tmax,salt of this reaction is less than the melting point of Li2S (the byproduct salt), this reaction was not expected to propagate. However, some AlN is produced through this reaction. To understand(27) Gillan, E. G.; Kaner, R. B. Inorg. Chem. 1994, 33, 5693-5700. Table 1. Calculated and Measured Reaction Temperatures of AlN-Producing Solid-State Metathesis Reactions reaction Tmax,calc (K) Tmax,exp (K) Tmax,salt (K) AlCl3 + 0.5Ca3N2 f AlN + 1.5CaCl2 2208 1673 (2010)a 1427 AlCl3 + Li3N f AlN + 3LiCl 1656 1513 1503 0.5Al2S3 + Li3N f AlN + 1.5Li2S 2073 1373 1086 a Reaction carried out in insulated ceramic reactor. Figure 2. In situ temperature measurements for the following AlN reactions: (a) AlCl3 + 0.5 Ca3N2 in an insulating cup, (b) AlCl3 + 0.5 Ca3N2, (c) AlCl3 + Li3N, and (d) 0.5 Al2S3 + Li3N. Metathesis Routes to Aluminum Nitride Inorganic Chemistry, Vol. 42, No. 8, 2003 2717 why this occurs, it is worth considering the temperatures at which the reactants change phase. AlCl3 sublimes at ap- proximately 453 K, whereas Al2S3 does not melt until 1645 K.23,28 Because the Nichrome wire detonator heats to near 1100 K when current is run through it, there is ample energy to vaporize some of the molecular solid AlCl3, but not the extended network structure of Al2S3, which remains in solid form. Thus, the stability of Al2S3 leads to an incomplete reaction with Li3N, while the high melting point of Li2S (the byproduct salt) prevents self-propagation because a molten salt does not form (the melting point for Li2S > Tmax,salt). This explains why the observed Tmax value is much lower than expected. The morphologies of the products were characterized using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). An SEM image of the AlCl3 + Ca3N2 reaction product is shown before (Figure 3a) and after (Figure 3b) washing in acid. Figure 3a demonstrates that, before the byproduct CaCl2 is washed away, the product appears as a molten salt (CaCl2). After being washed in 1 M phosphoric acid to remove the CaCl2 byproduct salt, the product appears as expectedsa white, fluffy, micron-sized powder. The AlN product is composed of well-formed, micron-sized crystallites as imaged with TEM (Figure 4). The edges are well-defined, thus demonstrating that hydroly- sis has not destroyed the surface morphology of the sample. Conclusions A solid-state metathesis reaction between AlCl3 and Ca3N2 is shown to be a fast, reliable method for producing high- quality aluminum nitride. The driving force behind the reaction is the formation of a thermodynamically stable byproduct salt that is easily removed from the nitride product through an acid wash/filtration process. This highly exo- thermic reaction reaches a temperature above 2100 K within a fraction of a second and then quickly cools to room temperature. Theoretical maximum reaction temperature (28) Lide, D. R. CRC Handbook of Chemistry and Physics, 3rd electronic ed.; CRC Press: Boca Raton, FL, 2001. Figure 3. Scanning electron microscopy (SEM) images of the AlN product formed in the reaction between AlCl3 and Ca3N2: (a) before acid washing, the product appears as a melt of CaCl2, and (b) after acid washing, pure AlN appears as a fine micron-sized powder. Figure 4. Transmission electron microscopy (TEM) image of representa- tive AlN product demonstrating well-formed crystallites and micron-sized domains. Janes et al. 2718 Inorganic Chemistry, Vol. 42, No. 8, 2003 calculations based on thermodynamic data and in situ temperature measurements were used to gain an understand- ing of these metathesis reactions. Higher sustained reaction temperatures are necessary for the formation of phase-pure AlN. At lower temperatures, incomplete nitridation leads to aluminum impurities as well as aluminum oxide, which forms upon washing. Extension of this method to produce other nitrides using Ca3N2 as the nitriding agent along with a thermally insulating ceramic reaction vessel is now in progress. Acknowledgment. The authors thank Richard G. Blair for his help with the in situ temperature measurements. This work was supported by the National Science Foundation, Grant DMR-0073581. IC026143Z Metathesis Routes to Aluminum Nitride Inorganic Chemistry, Vol. 42, No. 8, 2003 2719