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Hiden EQP
Mass/Energy Analyser for Plasma
Diagnostics and Characterisation
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Quadrupole Mass Spectrometers for Advanced Science
EQP Overview
The Hiden EQP System is an advanced plasma diagnostic tool with
combined high transmission ion energy analyser and quadrupole
mass spectrometer, acquiring both mass spectra at specified ion
energies and ion energy distributions of selected plasma ions.
The advanced EQP ioniser provides
for neutral and radical detection,
the electron attachment ionisation
feature further enhancing the
detection capability for radicals in
electronegative plasma
chemistries.
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Quadrupole Mass Spectrometers for Advanced Science
Features
• Sub PPM detection of plasma ions, neutrals and radicals.
• Ion Energy Analysis, 0-100eV and 0-1000eV energy range versions are
available.
• Positive and Negative Ion Analysis.
• Neutral and Radical Species Detection.
• Electron attachment ionisation mode for the study of electro-negative
radicals
• Mass range options: 50, 300, 510 or 1000 amu
• For afterglow, pulsed plasma, and laser ablation, a standard TTL signal
gating input is included for time resolved studies.
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Quadrupole Mass Spectrometers for Advanced Science
Applications
EQP Systems are offered with a range of standard plasma sampling
options to provide a non invasive sampling interface for a broad
range of plasma applications including:
• ECR- Electron Cyclotron Resonance
• HIPIMS
• Magnetron Discharge
• Helicon Source
• DC Glow Discharge Plasma
• Pulsed Plasma & Laser Ablation
• Parallel Plate - RF Plasma
• ICP- Inductively Coupled Plasma
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Quadrupole Mass Spectrometers for Advanced Science
EQP System Schematic
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Quadrupole Mass Spectrometers for Advanced Science
Typical Operating Configuration
Plasma
Typically 100 mTorr
Mass Spectrometer
Typically 1 x 10-7 Torr
60 l.min-1 Turbo Pump
Sampling Orifice
100 µm
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Quadrupole Mass Spectrometers for Advanced Science
Laser Drilled Orifice
• User selected dimension from 30 - 300 m.
• +ve / -ve ions, neutrals or radicals.
• Pre-thinned for optimum sampling.
• Plasma electrode coupling option – allows
the user to configure the orifice to exactly
follow electrode conditions during operation.
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Quadrupole Mass Spectrometers for Advanced Science
• Software controlled and optimised extraction
and focussing optics.
• Discriminates +ve and –ve ions as well as e- and
radicals.
• Fully tuneable for optimal detection.
• Integrated ionisation source.
Extraction Optics
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Quadrupole Mass Spectrometers for Advanced Science
Ionisation Source
• Fully software controllable electron energy (0-150 eV) and thermionic emission
(0.2-2000 µA).
• Electron Impact, Appearance Potential, Soft Ionisation modes allow for powerful
characterisation of the neutral and radical species from the plasma.ccl2f2 plasma off -on -off. 18mTorr chamber preasure.
SEM:c/s
electron-energy : V
1
10
100
1000
5 9.16667 13.3333 17.5 21.6667 25.8333 30
ccl2f2 plasma off -on-off. 18mTorr chamber preasure.
SEM:c/s
electron-energy : V
1
10
100
1000
5 9.16667 13.3333 17.5 21.6667 25.8333 30
Plasma off
Plasma on
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Quadrupole Mass Spectrometers for Advanced Science
Ion Source Control
10
100
1000
10000
-2-10 1 2 3 4 5 6 7 8 910111213141516171819
C/S
energy / eV
1
10
100
1000
10000
0 5 10 15 20 25 30 35 40 45 50 55
electron energy : V
Intensity:c/s
Plasma On
Electron Energy Scans
Plasma On/Off comparison of the
production of CF2 ions.
Energy Scan of Fast Neutrals
Cu Atom Energy Distribution from a DC
magnetron discharge.
Plasma Off
e + CF4  CF2
+ + F2 + 2e (19.3eV)
e + CF4  CF2
+ + 2F +2e (20.9eV)
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Quadrupole Mass Spectrometers for Advanced Science
45° Electrostatic Sector Energy Analyser
• Constant transmission at all ion energies.
• Minimum perturbation of ion flight path.
• Energy resolution - 0.25 eV FWHM.
• Energy scan at increments from 0.05 eV.
• Floating option available up to 10 KeV.
0
50000
100000
150000
200000
250000
300000
350000
400000
450000
500000
0 5 10 15 20SEMC/S
ION ENERGY EV
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Quadrupole Mass Spectrometers for Advanced Science
• Strict control over the quadrupole entrance and exit fields provides
enhanced sensitivity for high mass transmission and increased abundance
sensitivity.
• Enhanced long-term stability. The bulk of the deselected ions from the
ioniser deposit harmlessly on the RF-only pre-filter stage, minimising
contamination on the mass selective primary filter.
Triple Filter Mass Spectrometer
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Quadrupole Mass Spectrometers for Advanced Science
Quadrupole Diameter
• Configured with 6mm or 9mm
What pole diameter do I need?
• Total RF output power is fixed for a given generator.
• Power demand increases dramatically with increasing RF frequency:
(∝ ν5)
• For given mass, performance improves with increasing frequency.
• For given tolerances, transmission and mass separation improve with increasing
pole diameter.
• Overall size and cost increase with increasing pole diameter.
• Enlarging pole diameter increases assembly capacitance and limits RF range
(increases power losses).
50/300/510 amu
50/300/510/1000/2500 amu
6mm
9mm
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Quadrupole Mass Spectrometers for Advanced Science
• 7 decade continuous dynamic range.
• 24 bit counter for 1 c/s resolution.
• Faraday Cup option for high density plasmas.
• Signal gating with 50 ns time resolution for
energy & mass distributions.
• Comprehensive data export options.
Secondary Electron Multiplier
(SEM) Detector
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Quadrupole Mass Spectrometers for Advanced Science
• Signal gating input with 0.1 µs resolution is standard.
• Enhanced signal gating modes including programmable signal gating and MCS
are available as system options or upgrades.
• Programmable signal gating includes foreground and background delay timers
to monitor two time zones with respect to a relative repeated event.
Programmable Signal Gating
Features:
• 0.1 µs minimum gate delay and
width.
• Automatic background subtraction
for modulated molecular beam
studies.
• Ion flight time measurements.
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Quadrupole Mass Spectrometers for Advanced Science
• Optional innovative Multi-Channel Scalar (MCS) device integrated into controller
firmware and MASsoft v7 software.
• 6000-bin multichannel scalar resolution offering 50 ns time resolution.
• Data is intuitive to obtain and can be manipulated in external programmes such as
Excel and Origin.
Multi-Channel Scalar (MCS) Device
Suitable for transient event analysis applications
such as:
• Beam chopper inlets.
• Plasma ignition/modulation/extinction
experiments.
• Ion flight time measurements.
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Quadrupole Mass Spectrometers for Advanced Science
• Analysis through: - viewport
- grounded electrode
- driven electrode
• High pressure plasmas with double differential pumping.
• Magnetically confined plasmas with optional Mu-metal & radio-metal
shielding.
• Analysis of high mass (1000 amu).
• Analysis of high energy (1000 eV).
Configuration Options
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Quadrupole Mass Spectrometers for Advanced Science
1000 amu EQP with z drive EQP with RF driven electrode
Configuration Options
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Quadrupole Mass Spectrometers for Advanced Science
Clamping ring
Driven Electrode
Extractor nozzle
Electrode
support body
Driven Electrode
Controllable Orifice Cover
Configuration Options
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Quadrupole Mass Spectrometers for Advanced Science
MASsoft 7 Professional control software
A multilevel software package
allowing both simple control of mass
spectrometer parameters and
complex manipulation of data plus
control of external devices.
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Quadrupole Mass Spectrometers for Advanced Science
Selected Publications
• Latest publications
• Negative-ion surface production in hydrogen plasmas: modelling of negativeion
energy distribution functions and comparison with experiments. 2013. A
Ahmad et al. Plasma Sources Sci. Technol. 22 025006
• Spacially enhanced Langmuir probe measurements of a magnetically enhanced
hollow cathode arc plasma. 2011. B Zimmermann et al. Surface and coatings
technology 205 5393-5396
• Quantification of the deuterium ion fluxes from a plasma source. 2011. A
Manhard et al. Plasma Sources Sci. Technol. 20 015010
• Advantages of highly ionized pulse plasma magnetron sputtering of silver for
improved E. coli inactivation. 2012. O Baghriche et al. Thin Solid Films 520 3567-
3573
• Influence of high power impulse magnetron sputtering plasma ionization on the
microstructure of TiN thin films. 2011. AP Ehiasarian. J. Appl. Phys. 109 104314
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Quadrupole Mass Spectrometers for Advanced Science
Selected Hiden EQP Users
• Xi’an Modern Chemistry Institute
• University d’Orleans
• Southwest Research Institute
• KRICT
• INP Greifswald
• Applied Materials
• Fraunhofer IWS
• Ruhr-Universität Bochum
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Quadrupole Mass Spectrometers for Advanced Science
• High performance probe for mass and energy analysis of
ions, radicals and neutrals from a plasma.
• A large number of options are available in order to
sample from a variety of plasma types.
• The EQP sees use worldwide in a variety of plasma
applications.
0
100000
200000
300000
400000
500000
0 5 10 15 20
SEMc/s
Ion Energy eV
Summary
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Quadrupole Mass Spectrometers for Advanced Science
Hiden Analytical Ltd.
420 Europa Boulevard
Warrington, WA5 7UN, England
HidenAnalytical.com
info@hiden.co.uk
Tel: +44 (0)1925 445 225