F5150 Physics of thin films

Faculty of Science
Autumn 2008
Extent and Intensity
2/1/0. 4 credit(s). Type of Completion: z (credit).
Teacher(s)
doc. RNDr. Karel Navrátil, CSc. (lecturer)
doc. RNDr. Karel Navrátil, CSc. (seminar tutor)
Guaranteed by
prof. RNDr. Josef Humlíček, CSc.
Department of Condensed Matter Physics – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Karel Navrátil, CSc.
Timetable
Tue 13:00–14:50 F3,03015, Tue 15:00–15:50 F3,03015
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
Main objectives can be summarized as follows: problems of the technological generation of 2D structures, the growth mechanism of those structures, understanding the relation between properties of metallic, semiconducting and dielectric thin films and the processes of their preparation. Dimensional effect.
Syllabus
  • Thin film deposition technology:thermal evaporation, cathodic sputtering, physical methods for preparation of epitaxial films,chemical methods used for deposition of thin films,anodic and thermal oxidation.Thiskness measurement and analytical techniques:electrical methods, gravimetric measurements,quartz crystal monitor,stylus,emissive-absorption methods,chemical analysis,structural analysis.Nucleation and growth of thin films:growth process,coalescence,influence of deposition parameters,epitaxial-growth phenomena,theory of epitaxy. Mechanical properties:internal stress,origin of intrinsic stress,mechanical properties,adhesion of films.Electron transport in films:conduction in continuous and discontinuous metal films,electrical conduction of semiconducting and insulator films.Optical properties of layers:optical synthesis and analysis of stratified media,optical properties of films. Applications of thin films.
Literature
  • K.L.Chopra> Thin film phenomena (McGraw-Hill Book Co.) 1969.
Assessment methods
The credit on the basis of active attendance during of lesson
Language of instruction
Czech
Further comments (probably available only in Czech)
The course can also be completed outside the examination period.
The course is taught once in two years.
General note: S.
The course is also listed under the following terms Autumn 2000, Autumn 2002, Autumn 2004, Autumn 2006.
  • Enrolment Statistics (recent)
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