F6400 Semiconductor technology laboratory

Faculty of Science
autumn 2021
Extent and Intensity
0/0/2. 2 credit(s) (plus extra credits for completion). Type of Completion: z (credit).
Teacher(s)
doc. RNDr. Petr Mikulík, Ph.D. (lecturer)
Guaranteed by
prof. RNDr. Josef Humlíček, CSc.
Department of Condensed Matter Physics – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Petr Mikulík, Ph.D.
Supplier department: Department of Condensed Matter Physics – Physics Section – Faculty of Science
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
The course allows students to perform a complete technological process leading to preparation of active semiconductor devices (diodes, transistors, test devices) on a silicon wafer in a clean room laboratory for microelectronics. Analytical methods for structure characterization and electrical measurements will be applied during and after the process.
Syllabus
  • Clean room facility and microelectronics.
  • Handling of silicon wafers.
  • Diodes, transistors, resitors, electronic devices, chips.
  • Oxidation, doping, sputtering.
  • Photolithography.
  • Cleaning, etching.
  • Thickness measurement.
  • Electrical measurements.
Teaching methods
Laboratory project.
Assessment methods
Credit is based on well written laboratory diary and presented measurements of the prepared devices.
Language of instruction
Czech
Further Comments
The course is taught annually.
The course is taught: every week.
The course is also listed under the following terms Autumn 2011, Autumn 2011 - acreditation, spring 2012 - acreditation, Autumn 2012, Autumn 2013, Autumn 2014, Autumn 2015, Autumn 2016, autumn 2017, Autumn 2018, Autumn 2019, Autumn 2020, Autumn 2022, Autumn 2023, Autumn 2024.
  • Enrolment Statistics (autumn 2021, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2021/F6400