FB502 Deposition and analysis of thin films

Faculty of Science
Autumn 2022
Extent and Intensity
1/2/0. 3 credit(s). Type of Completion: z (credit).
Teacher(s)
doc. RNDr. Vilma Buršíková, Ph.D. (seminar tutor)
Mgr. Daniel Franta, Ph.D. (seminar tutor)
Mgr. Jana Jurmanová, Ph.D. (seminar tutor)
doc. Mgr. Pavel Slavíček, Ph.D. (seminar tutor)
doc. Mgr. Pavel Souček, Ph.D. (seminar tutor)
RNDr. Monika Stupavská, PhD. (seminar tutor)
Mgr. Lukáš Zábranský, Ph.D. (seminar tutor)
Guaranteed by
doc. Mgr. Pavel Souček, Ph.D.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. Mgr. Pavel Souček, Ph.D.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Timetable
Wed 17:00–18:50 Kontaktujte učitele, Thu 10:00–10:50 Fs1 6/1017
Course Enrolment Limitations
The course is offered to students of any study field.
Course objectives
This course provides students with the means to familiarize themselves with the principles, possibilities and limitations of thin film deposition techniques as well as the techniques for their analyses. This knowledge and experiences are necessary for a correct choice of methods utilised during the students' research work during their studies as well as during their future careers.

The objectives can be summarized as:
- to familiarize the students with different thin film deposition techniques
- to familiarize the students with different techniques for thin film analyses
- to enable the students to acquire practical skills with these techniques
Learning outcomes
After completing the course, the student will be able to:
- understand the different deposition techniques
- understand the different analysis techniques
- critically asses the possibilities and limitations of the different techniques
- correctly choose the techniques to achieve desired results
Syllabus
  • 1. PVD/PE-CVD deposition techniques
  • 2. XPS - X-ray Photoelectron Spectroscopy
  • 3. SEM - Scanning Electron Microscopy
  • 4. Micro- and Nanoindentation
  • 5. Advanced Ellipsometry Methods
  • 6. AFM - Atomic Force Microscopy
  • 7. X-Ray Diffraction
  • 9. Raman Spectrometry
  • 10. Surface Energy Analysis
Literature
    recommended literature
  • Handbook of Thin Film Technology, FREY, Hartmut, KHAN, Hamid R, ISBN 978-3-642-05429-7
  • Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002, xxviii, 62. ISBN 0815514425. info
Teaching methods
lectures and laboratories
Assessment methods
Successful completion of the course will be based on completed laboratory reports.
Language of instruction
English
Further Comments
Study Materials
The course is also listed under the following terms Autumn 2019, Autumn 2020, autumn 2021, Autumn 2023, Autumn 2024.
  • Enrolment Statistics (Autumn 2022, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2022/FB502