FC250 Nano- and microtechnologies

Faculty of Science
Spring 2013
Extent and Intensity
2/1. 3 credit(s) (plus extra credits for completion). Type of Completion: k (colloquium).
Teacher(s)
prof. RNDr. Mirko Černák, CSc. (lecturer)
doc. Mgr. Lenka Zajíčková, Ph.D. (lecturer)
Anton Manakhov, Ph.D. (seminar tutor)
Guaranteed by
prof. RNDr. Mirko Černák, CSc.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. Mgr. Lenka Zajíčková, Ph.D.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Timetable
Thu 8:00–9:50 Fs1 6/1017, Thu 10:00–10:50 Fs1 6/1017
Prerequisites (in Czech)
Výhodou je absolvování předmětu F4280 Technologie depozice a povrchových úprav a znalost základů fyziky plazmatu (předměty F5170 Úvod do fyziky plazmatu, F7241 Fyzika plazmatu 1, Fyzika plazmatu 2).
Course Enrolment Limitations
The course is offered to students of any study field.
Course objectives
At the end of the course students should be able to explain what processes and methods are used in micro- and nanotechnologies. They will be able to understand basis of plasma physics and plasma sources. Furthermore, they will be able to decide what methods and procedures should be chosen for creation of certain micro- and nanostructures by combination of etching, thin film deposition and self-organized processes of material synthesis.
Syllabus
  • Overview of processes and methods applied in micro- and nanotechnologies
  • Introduction to plasma physics and plasma sources
  • Technologies of etching in microelectronics
  • Technologies of thin film deposition
  • Synthesis of nanostructured materials by self-organization
Literature
  • ROTH, Reece J. Industrial plasma engineering. Volume 2, Applications to nonthermal plasma processing. Bristol: Institute of Physics Publishing, 2001, xi, 645 s. ISBN 0-7503-0544-4. info
  • ROTH, Reece J. Industrial plasma engineering. Volume 1, Principles. Bristol: Institute of Physics Publishing, 1995, xiii, 538. ISBN 0-7503-0317-4. info
Assessment methods
colloquim - common discussion on individual topics
Language of instruction
Czech
Further comments (probably available only in Czech)
Study Materials
The course is taught annually.
The course is also listed under the following terms Spring 2008 - for the purpose of the accreditation, Spring 2011 - only for the accreditation, Spring 2007, Spring 2008, Spring 2009, Spring 2010, Spring 2011, Spring 2012, spring 2012 - acreditation, Spring 2015, Spring 2017, Spring 2019, Spring 2021, Spring 2023.
  • Enrolment Statistics (Spring 2013, recent)
  • Permalink: https://is.muni.cz/course/sci/spring2013/FC250