F3390 Micro- and nano- structures preparation

Faculty of Science
Autumn 2022
Extent and Intensity
2/0/0. 2 credit(s) (plus extra credits for completion). Type of Completion: zk (examination).
Teacher(s)
Mgr. Ondřej Jašek, Ph.D. (lecturer)
RNDr. Richard Krumpolec, PhD. (lecturer)
Guaranteed by
Mgr. Ondřej Jašek, Ph.D.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: Mgr. Ondřej Jašek, Ph.D.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Timetable
Thu 18:00–19:50 F3,03015
Prerequisites (in Czech)
! F3390E Micro- nano- struct. prepar. && !NOW( F3390E Micro- nano- struct. prepar. )
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
The lecture course will introduce students with the basic methods and principles of micro and nano-structures fabrication.
Learning outcomes
Student will be able to:
- describe the principles of main wet-methods for preparing thick films;
- explain the principles if main dry-methods for preparing thin films, especially CVD, ALD and PECVD;
- explain principles and novel trends in surface patterning by means of optical, electron beam or atomic probe litography;
- characterize various methods for preparing 1D structures - nanoparticles;
- Describe in detail synthesis and characterization of known nanostructured carbon materials.
Syllabus
  • Physical and chemical methods of nanoparticels synthesis • Nanoparticles separation and material analysis • Plasma deposition and plasma etching • Electrospinning a nanofibers • Nanostructured carbon (nanotubes, graphene, fullerenes) • Template-based synthesis methods • Fabrication of micro and nano-mechanical structures • Nanoimprinting methods
Literature
  • Springer handbook of nanotechnology. Edited by Bharat Bhushan. 2nd/3rd ed. Berlin: Springer, 2010, 1 DVD-ROM. ISBN 9783642025242. info
Teaching methods
lectures
Assessment methods
oral examination
Language of instruction
Czech
Further comments (probably available only in Czech)
Study Materials
The course is taught annually.
Information on course enrolment limitations: Není možné získat zároveň kredity za předmět F3390 a jeho anglickou verzi F3390E.
Listed among pre-requisites of other courses
The course is also listed under the following terms spring 2012 - acreditation, Spring 2014, Spring 2015, Spring 2016, Spring 2017, spring 2018, Spring 2019, Spring 2020, Autumn 2020, autumn 2021, Autumn 2023, Autumn 2024.
  • Enrolment Statistics (Autumn 2022, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2022/F3390