F3390 Micro- and nano- structures preparation

Faculty of Science
Spring 2020
Extent and Intensity
2/0/0. 2 credit(s) (plus extra credits for completion). Type of Completion: zk (examination).
Teacher(s)
Mgr. Ondřej Jašek, Ph.D. (lecturer)
doc. RNDr. Jozef Ráheľ, PhD. (lecturer)
Guaranteed by
doc. RNDr. Jozef Ráheľ, PhD.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Timetable
Thu 9:00–10:50 F3,03015
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
The lecture course will introduce students with the basic methods and principles of micro and nano-structures fabrication.
Learning outcomes
By taking this lecture, the student should be able to:
- understand the technology of manufacturing the monocrystal, polycrystal and amorphous materials, relevant for the semiconductor and MEMS industries;
- describe physical and technical principles of most common methods for preparing thin films from liquid and solid phase, namely electroplating, spincoating, dipcoating, CVD, ALD, PECVD, vacuum deposition, MBE and magnetron sputtering;
- explain the principles of main techniques of optical litography, charge beam litography and nanolitography;
- critically address main pros and cons of chief wet and dry etching methods;
- list main techniques for the making 1D structures by the top-down methods, including the method of electrospinning;
- understand underlying physical mechanisms responsible for self-assembly of layers and nanoparticles;
- explain and understand basic principles of synthesis of carbon nanostructures, including their structural and material analysis;
- understand principles of formation of nanoparticles and explain influence of plasma enviroment during their growth;
Syllabus
  • Chemical methods of nanoparticels synthesis
  • Nanoparticles separation and size-distribution analysis
  • Plasma deposition and plasma etching
  • Electrospinning a nanofibers
  • Nanostructured carbon (nanotubes, graphenes, fullerenes)
  • Template-based synthesis methods
  • Fabrication of micro and nano-mechanical structures
  • Nanoimprinting methods
Literature
    recommended literature
  • Springer handbook of nanotechnology. Edited by Bharat Bhushan. 2nd/3rd ed. Berlin: Springer, 2010, 1 DVD-ROM. ISBN 9783642025242. info
Teaching methods
lectures
Assessment methods
oral examination
Language of instruction
Czech
Further Comments
Study Materials
The course is taught annually.
Listed among pre-requisites of other courses
The course is also listed under the following terms spring 2012 - acreditation, Spring 2014, Spring 2015, Spring 2016, Spring 2017, spring 2018, Spring 2019, Autumn 2020, autumn 2021, Autumn 2022, Autumn 2023, Autumn 2024.
  • Enrolment Statistics (Spring 2020, recent)
  • Permalink: https://is.muni.cz/course/sci/spring2020/F3390