FC250 Plasma and Dry Nano/Microtechnologies

Faculty of Science
Spring 2019
Extent and Intensity
2/1/0. 3 credit(s) (plus extra credits for completion). Type of Completion: k (colloquium).
Teacher(s)
doc. Mgr. Lenka Zajíčková, Ph.D. (lecturer)
Guaranteed by
prof. RNDr. Mirko Černák, CSc.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. Mgr. Lenka Zajíčková, Ph.D.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Prerequisites
Basic knowledge of vacuum technique, gas kinetics, principles of chemical reactions, surface processes (adsorption, desorption, difussion), plasma processes and interaction of ions with materials. It is advantageous to pass the course F4280 Thin Films Deposition and Surface Modification Technologies.
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
there are 6 fields of study the course is directly associated with, display
Course objectives
At the end of the course students should be able to explain different approaches in nano/microtechnologies and understand their basic principles and requirements.
Syllabus
  • Nanotechnology - Definition and Examples
  • Repetition of Knowledge Base for Micro-/Nanotechnologies (gas kinetics, principles of chemical reactions, surface processes, plasma processes and interaction of ions with materials)
  • Basic Microfabrication Techniques (lithography, thin film deposition and doping, etching and substrate removal, substrate bonding)
  • MEMS Fabrication Techniques (bulk micromachining, surface micromachining, high-aspect-ratio micromachining)
  • Nanofabrication Techniques (e-beam nanofabrication, epitaxy and strain engineering, scanning probe techniques, self-assembly and template manufacturing)
  • Lessons from Nature - Biomimetics (multifunctional plant surfaces and smart materials, lotus effect: surfaces with roughness-induced superhydrophobicity, self-cleaning and low adhesion, biologically inspired attachment systems, gecko feet)
Literature
  • Springer handbook of nanotechnology. Edited by Bharat Bhushan. 3rd rev. and extended ed. New York: Springer, 2010, xlviii, 19. ISBN 9783642025242. info
  • CHEN, Francis F. and Jane P. CHANG. Lecture notes on principles of plasma processing. New York, N.Y.: Kluwer Academic/Plenum publishers, 2003, ix, 208. ISBN 0306474972. info
Assessment methods
colloquim - written test
Language of instruction
English
Further comments (probably available only in Czech)
Study Materials
The course is taught once in two years.
The course is taught: every week.
General note: S.
The course is also listed under the following terms Spring 2008 - for the purpose of the accreditation, Spring 2011 - only for the accreditation, Spring 2007, Spring 2008, Spring 2009, Spring 2010, Spring 2011, Spring 2012, spring 2012 - acreditation, Spring 2013, Spring 2015, Spring 2017, Spring 2021, Spring 2023.
  • Enrolment Statistics (Spring 2019, recent)
  • Permalink: https://is.muni.cz/course/sci/spring2019/FC250