F6540 Physical principles of the semiconductor technology

Faculty of Science
Autumn 2011
Extent and Intensity
3/0. 3 credit(s) (plus extra credits for completion). Type of Completion: k (colloquium).
Teacher(s)
RNDr. Petr Pánek, Ph.D. (lecturer), doc. RNDr. Petr Mikulík, Ph.D. (deputy)
Guaranteed by
prof. RNDr. Josef Humlíček, CSc.
Department of Condensed Matter Physics – Physics Section – Faculty of Science
Contact Person: doc. RNDr. Petr Mikulík, Ph.D.
Timetable
Fri 10:00–12:50 Fs1 6/1017
Course Enrolment Limitations
The course is offered to students of any study field.
Course objectives
Using the lectures by expert from industry, the main objective of the course is to provide the studetns with the ability to
- list and describe individual steps in semicondutors production and treatment
- apply the general knowledge on physics in physical and chemical description of the semiconductors production steps
Syllabus
  • The following topics will be covered:
  • Silicon wafer manufacturing technology overview
  • Silicon single crystal growth
  • Defects in silicon
  • Surface analysis in semiconductor manufacturing
  • Polishing and cleaning of silicon wafers
  • Silicon device fabrication overview
  • Silicon oxidation and impurity diffusion
  • Chemical vapor phase deposition and plasma assisted layer deposition
  • Photolithography, silicon oxide etching
  • Dry etching, metal sputtering
  • Applied statistics in industry
Literature
  • WOLF, Stanley and Richard N. TAUBER. Silicon Processing for the VLSI Era. Sunset Beach, California, U.S.A.: Lattice Press, 1999, 960 pp. Vol. 1: Process Technology. ISBN 978-0961672164. info
  • KERN, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. New Jersey, U.S.A.: Noyes Publications, 1993, 623 pp. Materials Science and Process Technology Series. ISBN 978-0815513315. info
  • KITTEL, Charles. Úvod do fyziky pevných látek. 1. vyd. Praha: Academia, 1985, 598 s. URL info
Teaching methods
Lectures and presentations by professionals in the sector
Assessment methods
final individual project
Language of instruction
Czech
Further comments (probably available only in Czech)
Study Materials
The course is taught once in two years.
General note: L.
The course is also listed under the following terms Spring 2008 - for the purpose of the accreditation, Spring 2002, Spring 2004, Spring 2006, Spring 2008, Spring 2010, Autumn 2011 - acreditation, spring 2012 - acreditation, Autumn 2013, Autumn 2015, autumn 2017, Autumn 2019, autumn 2021, Autumn 2023.
  • Enrolment Statistics (Autumn 2011, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2011/F6540